SMC's Newest Releases: High Vacuum Equipment
Vacuum Angle Valve with Release Valve XLJ Series - Updated June 2019
Series: XLJ | Actuation: Electromagnetic
Valve Type: Normally Closed / Vacuum Pilot | Shaft Seal System: O-Ring Seal | Flange Size: 25, 40
- Prevents the reverse flow of oil through the roughing pump (rotary pump) into the chamber
- Reduced piping labor due to the built-in release valve structure
MORE INFORMATION:
Safety Instructions
Aluminum High Vacuum Angle Valve XLA/C-100·160(-1)-X152 - Updated November 2018
Series: XLA-100·160-X152 | Actuation: Air operated | Valve type: Single acting (N.C.) | Shaft seal system: Bellows seal | Application: Dust free, cleaned | Flange size: 100, 160
Series: XLC-100·160-1-X152 | Actuation: Air operated | Valve type: Double acting | Shaft seal system: Bellows seal | Application: Dust free, cleaned | Flange size: 100, 160
- Improved durability of bellows (Flange sizes 100 and 160)
- Service life of two million cycles
- Space required for equipment can be reduced. Without restriction on exhaust direction (two ways: from valve element side to bellows side and vice versa) Increased flexibility of mounting orientation
- Lightweight, Compact
MORE INFORMATION:
Safety Instructions |
Auto Switches Common Specifications
For 300 mm wafer Parallel Seal Type Slit Valve XGTP Series - Updated February 2018
Series: XGTP | Operating environmental pressure (Pa)(abs): Atmospheric pressure to 10-6 | Fluid: Inert gas | Opening window size (Height x Width) (mm): 50 x 336 | Operating pressure (MPa)(G): 0.45 to 0.6
- Long service life 3 million cycles (at ordinary temperature)
- Low particle generation Reduced by 1/5 or more (compared with the current product)
- Easier maintenance: Easy replacement of bellows. Gate can be replaced from above.(Made to order)
- Safety measures: Mechanical end lock mechanism is adopted.
MORE INFORMATION:
Safety Instructions |
System Configuration / Series Variations
Aluminum High Vacuum Angle Valve XL◻ Series - Updated January 2017
Series: XLA-2 | Actuation: Air operated | Valve type: Single acting (N.C.) | Shaft seal system: Bellows seal | Application: Dust free, cleaned | Flange size: 16 to 80
Series: XLAV-2 (With solenoid valve) | Actuation: Air operated | Valve type: Single acting (N.C.) | Shaft seal system: Bellows seal | Application: Dust free, cleaned | Flange size: 16 to 80
Series: XLC-2 | Actuation: Air operated | Valve type: Double acting | Shaft seal system: Bellows seal | Application: Dust free, cleaned | Flange size: 16 to 80
Series: XLF-2 | Actuation: Air operated | Valve type: Single acting (N.C.) | Shaft seal system: O-ring seal | Application: High-speed operation, High operating cycles | Flange size: 16 to 80
Series: XLFV-2 (With solenoid valve) | Actuation: Air operated | Valve type: Single acting (N.C.) | Shaft seal system: O-ring seal | Application: High-speed operation, High operating cycles | Flange size: 16 to 80
Series: XLG-2 | Actuation: Air operated | Valve type: Double acting | Shaft seal system: O-ring seal | Application: High-speed operation, High operating cycles | Flange size: 16 to 80
- A model with a solenoid valve has been added. [New]
- A heat-resistant 2-color indicator solid state auto switch has been added to the high-temperature type. [New]
MORE INFORMATION:
Safety Instructions |
Auto Switches Common Specifications