High Vacuum Equipment



System Configuration / Series Variations

Click on the series name to display the catalog. Click on CAD to search the CAD data.


Aluminum High Vacuum Angle Valve XLx

 

Series/CAD Actuation Shaft seal
system
Valve
type
Material Flange
size

Aluminum One-Touch Connection and Release High Vacuum Angle Valve XLAQ/XLDQ

 

Series/CAD Actuation Shaft seal
system
Valve
type
Material Flange
size

Stainless Steel High Vacuum Angle / In-Line Valve XM/XY

 


Note: Size 16 is not Available for In-Line Type.

Series/CAD
(Angle/In-line)
Actuation Shaft seal
system
Valve
type
Material Flange
size

Auto Switch D

 

Series Type Features

High Vacuum Straight Solenoid Valve XSA

 

Series/CAD Valve type Fluid Piping Port size

Smooth Vent Valve XVD

 

Series/CAD Valve type Fluid Piping Port size

Silt Valve XGT

 

Series/CAD Operating
pressure
range (Pa)
Fluid Gate size
(Height x Width)
(mm)
Operating
pressure
(MPa)

Rodless Cylinder for Vacuum CYV

 

Series/CAD Operating environment pressure [Pa (ABS)] Bore size (mm)

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